Chemical Vapor Deposition of Tungsten and Tungsten Silicides for VLSI/ ULSI Applications (Materials Science and Process Technology Series)
William Andrew
ISBN13:
9780815512882
$88.44
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William Andrew
Chemical Vapor Deposition of Tungsten and Tungsten Silicides for VLSI/ ULSI Applications (Materials Science and Process Technology Series)
- | Author: John E.J. Schmitz
- | Publisher: William Andrew
- | Publication Date: January 14, 1993
- | Number of Pages: 251 pages
- | Language: English
- | Binding: Hardcover
- | ISBN-10: 0815512880
- | ISBN-13: 9780815512882
- Author:
- John E.J. Schmitz
- Publisher:
- William Andrew
- Publication Date:
- January 14, 1993
- Number of pages:
- 251 pages
- Language:
- English
- Binding:
- Hardcover
- ISBN-10:
- 0815512880
- ISBN-13:
- 9780815512882
