Resonant Network Antennas Radio-Frequecy Plasma Sources : Theory, Technology and Applications

Resonant network antennas can overcome the limitations of conventional RF plasma sources. Their intense currents at resonance are well suited for inductive coupling in novel reactor configurations. This reference text explains the complete theory of resonant antennas, from fundamental circuits to mutual partial inductance coupling with plasma, and helicon wave theory.

• | Author: Ivo Furno, Alan Howling, Philippe Guittienne
• | Publisher: IOP Publishing Limited
• | Publication Date: Feb 28, 2024
• | Number of Pages: NA pages
• | Language: English
• | Binding: Hardcover
• | ISBN-10: 0750352949
• | ISBN-13: 9780750352949