Plasma Etching: An Introduction (Plasma -- Materials Interactions)

Plasma Etching: An Introduction (Plasma -- Materials Interactions)

Academic Press
SKU:
9780124693708
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ISBN13:
9780124693708
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Description
  • | Author: Dennis M. Manos
  • | Publisher: Academic Press
  • | Publication Date: Jul 28, 1989
  • | Number of Pages: 476 pages
  • | Language: English
  • | Binding: Hardcover
  • | ISBN-10: 0124693709
  • | ISBN-13: 9780124693708
Additional Information
Author:
Dennis M. Manos
Publisher:
Academic Press
Publication Date:
Jul 28, 1989
Number of pages:
476 pages
Language:
English
Binding:
Hardcover
ISBN-10:
0124693709
ISBN-13:
9780124693708
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